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Taikisha's air washer handles high-velocity
airflow
Whereas ordinary air washers ventilate at an airflow speed of
2.5 m/second, Taikisha's air washer ventilates at over 5 m/second.
With the same air volume the unit takes up only half the space,
allowing for miniaturization. It also features excellent saturation
efficiency and heating efficiency.
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| Flow diagram |
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No. |
Structural Component |
Specification |
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1 |
Auto
roll filter |
AFI 85% |
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2 |
Medium-capacity
filter |
NBS 90% |
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3 |
Preheater |
Heating coil |
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4 |
Eliminator |
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5 |
Air washer
nozzle |
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6 |
Eliminator |
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No. |
Structural Component |
Specification |
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7 |
Reheating
coil |
Warm water coil |
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8 |
Ventilation
fan |
100% x 1
direct motor
(beltless) |
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9 |
Buffer
board |
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10 |
HEPA
filter |
DOP 99.97%
(0.3µm) |
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11 |
Washer
pump |
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High-speed eliminator enables
faster air washer
High-speed ventilation without effective technology for eliminating
water droplets precludes the use of the high-speed air washer.
Taikisha's proprietary high-speed eliminator technology solves
this problem.
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High-speed eliminator |
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Optimum elimination of chemicals
in semiconductor factories
The air washer is an air-conditioning device that controls temperature
and humidity by spraying water into air. Because it cleans the
air with water, it also effectively eliminates chemical components
from the outside air.
Taikisha's high-speed air washer can remove over 85% of chemical
particles other than NOx. Compared to particle removal using
chemical filters alone, the air washer offers several advantages,
including reduced pressure loss, smaller space requirements,
and no need for filter changes. These merits also translate
into lower running costs. With only an external chemical filter
for NOx installed, the high-speed air washer has been highly
evaluated by customers.
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| Comparison of chemical
removal efficiency |
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Taikisha's air washer technology:
Making the best even better
Taikisha is working to develop technology for controlling temperature
and humidity using the air washer alone. This will reduce energy
consumption and air resistance, thereby enabling reduced conveyance
power,
lower noise, and other merits.As the first step, we have completed an air washer that does not use a refrigeration coil. Present circulatory air washers, after adiabatically humidifying the outside air taken in, use a refrigeration coil to dehumidify the air, then a reheating coil to reheat it, thereby achieving the desired temperature and humidity level. This method, however, results in a large energy loss. |
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